Email this article Peculiarities of the Structure and Properties of Thin PZT Films with Strongly Nonuniform Depth–Composition Profiles
- Authors: Dolgintsev D.M.1, Staritsyn M.V.1,2, Pronin V.P.1, Kaptelov E.Y.1,3, Senkevich S.V.1,3, Pronin I.P.1,3, Nemov S.A.4
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Affiliations:
- A.I. Herzen State Pedagogical University of Russia
- I.V. Gorynin Central Research Institute of Structural Materials Prometey, National Research Center Kurchatov Institute
- Ioffe Physical Technical Institute, Russian Academy of Sciences
- Peter the Great St. Petersburg Polytechnic University
- Issue: Vol 45, No 8 (2019)
- Pages: 839-842
- Section: Article
- URL: https://journal-vniispk.ru/1063-7850/article/view/208407
- DOI: https://doi.org/10.1134/S1063785019080200
- ID: 208407
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Abstract
Two-layer thin films of lead zirconate titanate (PZT) with lead content in the layers differing by 20% were deposited by RF magnetron sputtering at variable working gas pressure in the system. The phase states, compositions, and dielectric properties of two-layer films obtained with different orders of layer deposition were compared. It is established that the order of deposition significantly influences the conditions of crystallization of the perovskite phase and unipolar properties of PZT films.
About the authors
D. M. Dolgintsev
A.I. Herzen State Pedagogical University of Russia
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 191186
M. V. Staritsyn
A.I. Herzen State Pedagogical University of Russia; I.V. Gorynin Central Research Institute of Structural Materials Prometey, National Research Center Kurchatov Institute
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 191186; St. Petersburg, 191015
V. P. Pronin
A.I. Herzen State Pedagogical University of Russia
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 191186
E. Yu. Kaptelov
A.I. Herzen State Pedagogical University of Russia; Ioffe Physical Technical Institute, Russian Academy of Sciences
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 191186; St. Petersburg, 194021
S. V. Senkevich
A.I. Herzen State Pedagogical University of Russia; Ioffe Physical Technical Institute, Russian Academy of Sciences
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 191186; St. Petersburg, 194021
I. P. Pronin
A.I. Herzen State Pedagogical University of Russia; Ioffe Physical Technical Institute, Russian Academy of Sciences
Author for correspondence.
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 191186; St. Petersburg, 194021
S. A. Nemov
Peter the Great St. Petersburg Polytechnic University
Email: Petrovich@mail.ioffe.ru
Russian Federation, St. Petersburg, 195251
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