Email this article Ion-Beam Deposition of Thin AlN Films on Al2O3 Substrate
- Authors: Lunin L.S.1,2, Devitskii O.V.1,3, Sysoev I.A.3, Pashchenko A.S.1,2, Kas’yanov I.V.3, Nikulin D.A.3, Irkha V.A.1
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Affiliations:
- Federal Research Center, Southern Scientific Center of the Russian Academy of Sciences
- Platov South Russian State Polytechnic University
- North Caucasus Federal University
- Issue: Vol 45, No 12 (2019)
- Pages: 1237-1240
- Section: Article
- URL: https://journal-vniispk.ru/1063-7850/article/view/208511
- DOI: https://doi.org/10.1134/S106378501912023X
- ID: 208511
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Abstract
Thin aluminum nitride (AlN) films on sapphire (Al2O3) substrates were grown by means of ion-beam deposition (IBD) and studied by methods of scanning electron microscopy, Raman scattering, and optical transmission spectroscopy. Results revealed the influence of IBD process parameters (gas mixture composition, ion beam energy, and substrate temperature) on the morphology, structure, and optical properties of obtained thin AlN films on sapphire.
About the authors
L. S. Lunin
Federal Research Center, Southern Scientific Center of the Russian Academy of Sciences; Platov South Russian State Polytechnic University
Author for correspondence.
Email: lunin_ls@mail.ru
Russian Federation, Rostov-on-Don, 344006; Novocherkassk, Rostov oblast, 346428
O. V. Devitskii
Federal Research Center, Southern Scientific Center of the Russian Academy of Sciences; North Caucasus Federal University
Email: lunin_ls@mail.ru
Russian Federation, Rostov-on-Don, 344006; Stavropol, 355009
I. A. Sysoev
North Caucasus Federal University
Email: lunin_ls@mail.ru
Russian Federation, Stavropol, 355009
A. S. Pashchenko
Federal Research Center, Southern Scientific Center of the Russian Academy of Sciences; Platov South Russian State Polytechnic University
Email: lunin_ls@mail.ru
Russian Federation, Rostov-on-Don, 344006; Novocherkassk, Rostov oblast, 346428
I. V. Kas’yanov
North Caucasus Federal University
Email: lunin_ls@mail.ru
Russian Federation, Stavropol, 355009
D. A. Nikulin
North Caucasus Federal University
Email: lunin_ls@mail.ru
Russian Federation, Stavropol, 355009
V. A. Irkha
Federal Research Center, Southern Scientific Center of the Russian Academy of Sciences
Email: lunin_ls@mail.ru
Russian Federation, Rostov-on-Don, 344006
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