Analysis of the Structure of Multilayer Nanocrystalline Coatings Based on Plasma Mass Transfer Parameters Calculated by the Monte Carlo Method


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Аннотация

The results of the simulation of plasma fluxes onto the surface of rotating substrates during the combustion of a vacuum arc of the Cr–Ti–Mo cathode system are presented. The structure and composition of the arc-PVD Ti0.15Cr0.74Mo0.11N0.84 coatings are experimentally studied. The numerical simulation results of the coating structures based on experimental data were analyzed. The possibility of the simulation of the structure of multilayer, multicomponent coatings and the concentration distribution of chemical elements and its components is shown by calculating the plasma fluxes using the Monte Carlo method.

Авторлар туралы

A. Chernogor

National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)

Хат алмасуға жауапты Автор.
Email: avchernogor@gmail.com
Ресей, Moscow

I. Blinkov

National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)

Email: avchernogor@gmail.com
Ресей, Moscow

D. Belov

National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)

Email: avchernogor@gmail.com
Ресей, Moscow

V. Sergevnin

National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)

Email: avchernogor@gmail.com
Ресей, Moscow

A. Volkhonskii

National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)

Email: avchernogor@gmail.com
Ресей, Moscow

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