Analysis of the Structure of Multilayer Nanocrystalline Coatings Based on Plasma Mass Transfer Parameters Calculated by the Monte Carlo Method
- Авторы: Chernogor A.V.1, Blinkov I.V.1, Belov D.S.1, Sergevnin V.S.1, Volkhonskii A.O.1
-
Учреждения:
- National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)
- Выпуск: Том 45, № 2 (2019)
- Страницы: 75-78
- Раздел: Article
- URL: https://journal-vniispk.ru/1063-7850/article/view/208197
- DOI: https://doi.org/10.1134/S1063785019020056
- ID: 208197
Цитировать
Аннотация
The results of the simulation of plasma fluxes onto the surface of rotating substrates during the combustion of a vacuum arc of the Cr–Ti–Mo cathode system are presented. The structure and composition of the arc-PVD Ti0.15Cr0.74Mo0.11N0.84 coatings are experimentally studied. The numerical simulation results of the coating structures based on experimental data were analyzed. The possibility of the simulation of the structure of multilayer, multicomponent coatings and the concentration distribution of chemical elements and its components is shown by calculating the plasma fluxes using the Monte Carlo method.
Об авторах
A. Chernogor
National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)
Автор, ответственный за переписку.
Email: avchernogor@gmail.com
Россия, Moscow
I. Blinkov
National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)
Email: avchernogor@gmail.com
Россия, Moscow
D. Belov
National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)
Email: avchernogor@gmail.com
Россия, Moscow
V. Sergevnin
National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)
Email: avchernogor@gmail.com
Россия, Moscow
A. Volkhonskii
National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)
Email: avchernogor@gmail.com
Россия, Moscow
Дополнительные файлы
