Email this article Device for nanoobject manipulation based on two-layer composite with shape memory
- Authors: Dikan V.A.1, Mashirov A.V.2, Zakharov D.I.1, Mazaev P.V.2, Zhikharev A.M.2, Kalashnikov V.S.2, Koledov V.V.2, von Gratovski S.V.2, Sitnikov N.N.3, Irzhak A.V.1,4, Shelyakov A.V.3, Shavrov V.G.2
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Affiliations:
- National University of Science and Technology MISiS
- Kotel’nikov Institute of Radio Engineering and Electronics
- National Research Nuclear University MEPhI
- Institute of Microelectronic Technology and Ultrapure Materials
- Issue: Vol 61, No 3 (2016)
- Pages: 302-310
- Section: Novel Radio Systems and Elements
- URL: https://journal-vniispk.ru/1064-2269/article/view/196828
- DOI: https://doi.org/10.1134/S1064226916030086
- ID: 196828
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Abstract
A device for gripping of microand nanoobjects (nanotweezers) with a working body made of bimetal composite (fast-quenched Ti2NiCu alloy with shape memory and platinum layer) is developed and studied. A method for manufacturing of the composite material using local ion etching and ion-stimulated deposition from gas phase is proposed. A structure of nanotweezers based on such a composite and experiments on gripping and displacement of submicron objects are presented.
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About the authors
V. A. Dikan
National University of Science and Technology MISiS
Email: victor_koledov@mail.ru
Russian Federation, Leninskii pr. 4, Moscow, 119991
A. V. Mashirov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: victor_koledov@mail.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
D. I. Zakharov
National University of Science and Technology MISiS
Email: victor_koledov@mail.ru
Russian Federation, Leninskii pr. 4, Moscow, 119991
P. V. Mazaev
Kotel’nikov Institute of Radio Engineering and Electronics
Email: victor_koledov@mail.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
A. M. Zhikharev
Kotel’nikov Institute of Radio Engineering and Electronics
Email: victor_koledov@mail.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
V. S. Kalashnikov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: victor_koledov@mail.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
V. V. Koledov
Kotel’nikov Institute of Radio Engineering and Electronics
Author for correspondence.
Email: victor_koledov@mail.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
S. V. von Gratovski
Kotel’nikov Institute of Radio Engineering and Electronics
Email: victor_koledov@mail.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
N. N. Sitnikov
National Research Nuclear University MEPhI
Email: victor_koledov@mail.ru
Russian Federation, Kashirskoe sh. 31, Moscow, 115409
A. V. Irzhak
National University of Science and Technology MISiS; Institute of Microelectronic Technology and Ultrapure Materials
Email: victor_koledov@mail.ru
Russian Federation, Leninskii pr. 4, Moscow, 119991; ul. Akademika Osip’yana 6, Chernogolovka, Moscow oblast, 142432
A. V. Shelyakov
National Research Nuclear University MEPhI
Email: victor_koledov@mail.ru
Russian Federation, Kashirskoe sh. 31, Moscow, 115409
V. G. Shavrov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: victor_koledov@mail.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
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