Email this article Thermoelastic properties of micron-size actuators based on the Ti2NiCu//Pt composite with shape-memory effect
- Authors: Mazaev P.V.1, Koledov V.V.1, Shavrov V.G.1, Lega P.V.1, Mashirov A.V.1, Kamantsev A.P.1, Kuchin D.S.1, Kolesov D.V.2, Yaminskii I.V.2, Zakharov D.I.3, Dikan V.A.3, Irzhak A.V.3,4
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Affiliations:
- Kotel’nikov Institute of Radio Engineering and Electronics
- Moscow State University
- National Research Technological University MISiS
- Institute of Microelectronic Technology and Ultrahigh-Purity Materials
- Issue: Vol 61, No 6 (2016)
- Pages: 630-638
- Section: Physical Processes in Electron Devices
- URL: https://journal-vniispk.ru/1064-2269/article/view/197023
- DOI: https://doi.org/10.1134/S1064226916060176
- ID: 197023
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Abstract
Thermomechanical properties of microactuators with shape-memory effect (SME) based on the Ti2NiCu/Pt layered composite are analyzed. Atomic-force microscopy is used to experimentally determine rigidity of the composite microactuators that represent cantilevers with sizes of 50 × 2 × 1 μm and a thickness of the SME active alloy layer of 0.5 μm in a temperature interval of 20–100°C. Forces that are exerted by the composite actuator on a microscopic object are quantitatively estimated. The experimental data are in reasonable agreement with the calculated results.
About the authors
P. V. Mazaev
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
V. V. Koledov
Kotel’nikov Institute of Radio Engineering and Electronics
Author for correspondence.
Email: victor_koledov@mail.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
V. G. Shavrov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
P. V. Lega
Kotel’nikov Institute of Radio Engineering and Electronics
Author for correspondence.
Email: lega_peter@list.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
A. V. Mashirov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
A. P. Kamantsev
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
D. S. Kuchin
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Russian Federation, Mokhovaya ul. 11, str. 7, Moscow, 125009
D. V. Kolesov
Moscow State University
Email: lega_peter@list.ru
Russian Federation, Moscow, 119991
I. V. Yaminskii
Moscow State University
Email: lega_peter@list.ru
Russian Federation, Moscow, 119991
D. I. Zakharov
National Research Technological University MISiS
Email: lega_peter@list.ru
Russian Federation, Leninskii pr. 4, Moscow, 119049
V. A. Dikan
National Research Technological University MISiS
Email: lega_peter@list.ru
Russian Federation, Leninskii pr. 4, Moscow, 119049
A. V. Irzhak
National Research Technological University MISiS; Institute of Microelectronic Technology and Ultrahigh-Purity Materials
Email: lega_peter@list.ru
Russian Federation, Leninskii pr. 4, Moscow, 119049; ul. Akademika Osip’yana 6, Chernogolovka, Moscow oblast, 142432
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