Email this article Specific features of the formation of oblique texture in aluminum nitride films
- Authors: Luzanov V.A.1
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Affiliations:
- Kotel’nikov Institute of Radio Engineering and Electronics (Fryazino Branch)
- Issue: Vol 62, No 10 (2017)
- Pages: 1182-1183
- Section: Nanoelectronics
- URL: https://journal-vniispk.ru/1064-2269/article/view/198886
- DOI: https://doi.org/10.1134/S1064226917090157
- ID: 198886
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Abstract
Aluminum nitride films with oblique orientation of the texture axis are produced. Modifications of crystal structure depending on the deposition rate are studied. Two effects of the film growth related to the relation of the deposition rate and surface mobility of substance are analyzed.
About the authors
V. A. Luzanov
Kotel’nikov Institute of Radio Engineering and Electronics (Fryazino Branch)
Author for correspondence.
Email: valery@luzanov.ru
Russian Federation, Fryazino, Moscow oblast, 141190
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