Effect of Laser Exposure on the Process of Silicon Nanoparticle Fabrication


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Abstract

Silicon nanoparticles are obtained by nanosecond laser ablation of a single-crystal wafer under a deionized water layer. Nanoparticle generation mechanisms are studied depending on the incident energy density of laser radiation (7–12 J/cm2) and scanning speed (10–750 mm/s). At a scanning speed of 150–200 mm/s, a maximum of the extinction coefficient of obtained colloidal solutions of nanoparticles is observed, which can be caused by an increase in their mass yield.

About the authors

I. N. Saraeva

Lebedev Physical Institute

Author for correspondence.
Email: insar@lebedev.ru
Russian Federation, Leninskii pr. 53, Moscow, 119991

A. K. Ivanova

Lebedev Physical Institute; National Research Nuclear University “MEPhI”

Email: insar@lebedev.ru
Russian Federation, Leninskii pr. 53, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409

S. I. Kudryashov

Lebedev Physical Institute; National Research University of Information Technologies, Mechanics and Optics

Email: insar@lebedev.ru
Russian Federation, Leninskii pr. 53, Moscow, 119991; Kronverkskii pr. 49, St. Petersburg, 197101

A. A. Nastulyavichus

Lebedev Physical Institute

Email: insar@lebedev.ru
Russian Federation, Leninskii pr. 53, Moscow, 119991

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