Production and testing of diamond-based pressure sensors

Abstract

Automatic control, monitoring, and diagnostic systems are essential to technological progress and the improvement of machine-tool design. In turn, such systems rely on sensors, which collect information regarding mechanical quantities. Such sensors are also subject to the destabilizing physical factors that accompany machine-tool operation. In the present work, a diamond-based pressure sensor is described, and an appropriate manufacturing technology is outlined. Capacitive pressure sensors with a diamond membrane are produced and tested. The sensor characteristics are as follows: capacitance 8 pF; sensitivity 0.38 pF/kPa.