Nanoindentation of ZrN Coatings on Silicon and Copper Substrates

Abstract

An effective mathematical model is proposed to describe experiments on the indentation of samples with layered or functionally graded coatings. The model is based on the elastic contact problem corresponding to the penetration of a punch in a coated elastic half-space. A Berkovich indenter is considered. The results of the simulation and the experiments are compared for the indentation of two zirconium nitride (ZrN) coatings on substrates of monocrystalline (100) silicon and annealed copper. The agreement of the results is good.