Dynamic Monitoring of the Ion-Plasma Treatment of Complex Components

Abstract

Low-temperature ion-plasma treatment of metal workpieces may be monitored in terms of the electrical signals recorded in the circuit consisting of the plasma, the workpiece, the clamp, and ground. The electrical signals are analyzed by means of the Hurst statistic H, which provides a basic quantitative picture of the formation and modification of the signal structure in the course of machining. Experiments show that the best results (a surface layer of maximum hardness) are obtained when machining is accompanied by the generation of signals for which the Hurst statistic indicates antipersistent behavior.