Angle Sensor for a High-Speed Galvo Scanner

M. R. Gilyazov; K. Yu. Nagulin; A. Kh. Gil’mutdinov

doi:10.3103/S1068799818030261

Angle Sensor for a High-Speed Galvo Scanner

Authors: Gilyazov M.R.¹, Nagulin K.Y.¹, Gil’mutdinov A.K.¹
Affiliations:
1. Tupolev Kazan National Research Technical University
Issue: Vol 61, No 3 (2018)
Pages: 495-498
Section: Technical Notes Aircraft Equipment
URL: https://journal-vniispk.ru/1068-7998/article/view/230665
DOI: https://doi.org/10.3103/S1068799818030261
ID: 230665

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Abstract

The capacitive angle sensor of the galvanometer scanner is designed. The task of developing a rotation angle sensor in the range of ±20 deg for scanning speeds of up to 20 kHz is being solved. The linear dependence of the change in capacitance on the angle in the considered range is achieved.