Chemical assembly of a titanium oxide layer on microporous silica


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Abstract

The chemical assembly of a titanium oxide coating on a regular microporous silica surface by the atomic layer deposition method was considered. The change in the pore structure of the matrix was estimated, and a model of the coating formation in microporous materials was proposed.

About the authors

E. A. Sosnov

St. Petersburg State Institute of Technology (Technical University)

Author for correspondence.
Email: sosnov@lti-gti.ru
Russian Federation, Moskovskii pr. 26, St. Petersburg, 190013

T. S. Trubina

St. Petersburg State Institute of Technology (Technical University)

Email: sosnov@lti-gti.ru
Russian Federation, Moskovskii pr. 26, St. Petersburg, 190013

A. A. Malygin

St. Petersburg State Institute of Technology (Technical University)

Email: sosnov@lti-gti.ru
Russian Federation, Moskovskii pr. 26, St. Petersburg, 190013

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