Full-Optical Two-Channel Adaptive System for Detecting Microcantilever Vibrations

Abstract

We demonstrate a full-optical two-channel system for measuring mechanical vibrations of microoscillators, which is based on adaptive holographic interferometer using multiwave mixing in a photorefractive crystal. The orthogonal geometry of dynamic hologram recording makes possible independent operation of the measurement channels. The absolute detection limit of the system to cantilever vibrations in a channel amounted to 2.6·10⁻⁶ nm·W^1/2·Hz^−1/2. We tested the system in simultaneous detection of vibrations of two cantilevers with dimensions 215×40×15 μm.