Temperature field of dielectric films under continuous ion-beam irradiation

Abstract

In the present study, we theoretically examine the formation process of the steady-state temperature field in dielectrics under irradiation with a continuous ion beam in air with allowance for the temperature dependence of thermophysical quantities. Analytical expressions for the temperature field were obtained. An interconnected system of nonlinear algebraic equations for the steady-state temperatures at the front (irradiated) and rear surfaces of the sample, and the steady-state temperature at the interface between the ion-damaged and non-damaged region was obtained; by numerical solution of this system, a nonlinear dependence of the mentioned temperatures on the characteristics of incident ion flux was revealed.