Surface Modification of Corundum Ceramics by Argon Ion Beam

Abstract

The mechanical properties of near-surface layers of aluminum oxide ceramic treated with a continuous ion beam of argon are investigated. The phase and structural changes of the modified near-surface layers were analyzed by X-ray diffraction analysis and scanning electron microscopy, respectively. Samples for research were made from corundum plates used in microelectronics. Ion processing was carried out using an ILM-1 ion implanter equipped with a Pulsar-1M ion source based on a low-pressure glow discharge with a cold hollow cathode. Argon ions with energy of 30 keV and ion current density j = 300 μA/cm² were used for the irradiation. Two irradiation modes with the fluences of 10¹⁶ and 10¹⁷ cm^–2 were implemented. It was established that the ion treatment promotes the manifestation of the initial grain structure of a sample and increases the mechanical characteristics (modulus of elasticity and nanohardness) of near-surface layers of samples. According to the X-ray diffraction data, after the action of an ion beam, there is a decrease in the size of the coherent scattering region with respect to the initial state. The irradiation leads to an increase in the values of crystal lattice microstrains. Possible mechanisms of modifying the ceramic surface are discussed.