Effect of the metal content and annealing on the structure, phase composition, and nanohardness of fullerite–aluminum films

Abstract

The effect of thermal annealing on the structure, phase composition, and nanohardness of fullerite–aluminum films with different metal contents (from 1 up to 40 at % Al) prepared from the combined atomic–molecular f low on monocrystal silicon substrates has been studied by atomic force microscopy, X-ray diffraction, Raman spectroscopy, and nanoindentation. It is established that the heterophase composite formed by sputtering and containing the hexagonal phase of fullerite, fcc aluminum, and fullerite-like structures with nanoparticles incorporated into the interstices has increased nanohardness in comparison with pure fullerite and aluminum. Thermal annealing at 650 K leads to the enlargement of the structural elements more than 1.5–2 times compared with the freshly precipitated films, the share increase of aluminumphase fullerene, and a slight decrease in nanohardness. Also, the dependence of structural element proportion, the phase composition, nanohardness, the distribution of local rigidity, and the lateral forces on the surface of the films upon the metal content and thermal annealing was established.