Uncooled Microbolometer Based on VOx Film for Infrared and Millimeter-Wave Radiation

Abstract

The construction of an uncooled infrared and millimeter-wave microbolometer has been proposed. The microbolometer consists of a converter structure inside a metal box with an input glass window. The converter structure consists of a thin mica substrate covered with a frequency-dependent metal surface on the front side and thermosensitive VO_x elements with an electric circuit on the back side. The absorption of infrared radiation and millimeter waves is investigated. Radiation detection is studied numerically and experimentally in ranges of 0.4–16.66 μm and (0.33–0.37) × 10³ μm. The exploitation parameters of the device are determined and areas of application for the device are proposed.