Formation of an Array of Memristor Structures Using a Self-Assembly Matrix of Porous Anodic Aluminum Oxide
- Authors: Belov A.N.1, Golishnikov A.A.1, Kislitsin M.V.1, Perevalov A.A.1, Solnyshkin A.V.2, Shevyakov V.I.1
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Affiliations:
- National Research University of Electronic Technology
- Tver State University
- Issue: Vol 13, No 1-2 (2018)
- Pages: 34-37
- Section: Article
- URL: https://journal-vniispk.ru/2635-1676/article/view/220349
- DOI: https://doi.org/10.1134/S1995078018010032
- ID: 220349
Cite item
Abstract
In this paper we demonstrate a technological route for the formation of an array of memristor structures using a self-assembly matrix of porous anodic aluminum oxide. We propose using a porous alumina matrix as a solid mask to develop pores in the dense silicon oxide layer below the mask, in which a material characterized by the possibility of resistive switching is formed. The merit of this mask should include reproducibility and the high-precision control of geometric parameters of the pores. The current-voltage characteristics of a memristor structure based on solid electrolyte Cu2S are determined.
About the authors
A. N. Belov
National Research University of Electronic Technology
Author for correspondence.
Email: nanointech@mail.ru
Russian Federation, Moscow, 124498
A. A. Golishnikov
National Research University of Electronic Technology
Email: nanointech@mail.ru
Russian Federation, Moscow, 124498
M. V. Kislitsin
National Research University of Electronic Technology
Email: nanointech@mail.ru
Russian Federation, Moscow, 124498
A. A. Perevalov
National Research University of Electronic Technology
Email: nanointech@mail.ru
Russian Federation, Moscow, 124498
A. V. Solnyshkin
Tver State University
Email: nanointech@mail.ru
Russian Federation, Tver, 170100
V. I. Shevyakov
National Research University of Electronic Technology
Email: nanointech@mail.ru
Russian Federation, Moscow, 124498
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