Development and research of a laser photo-acoustic SF6 gas analyzer

Abstract

An analysis of various optical schemes for the development of a laser SF₆ gas analyzer based on a CO₂ laser operating in free-running mode and a resonant photo-acoustic detector (PAD) is presented. The use of a sealed gas-filled cell to normalize PAD signals on the absorbed power in the cell is suggested. Compensation for the influence of the tuning of the CO₂ laser wavelength near 10.6 μm on measured SF₆ concentration is possible. The results of experimental studies of a laser photo-acoustic SF₆ gas analyzer at various concentrations, including in the air flow, are presented. It is shown experimentally that the relative measurement error of the SF₆ concentration due to the instability of the laser radiation wavelength does not exceed 5% in the range from ~80 ppb to 40 ppm. The limit of the sensitivity of the developed gas analyzer was ~1 ppb SF₆.