Air conditioning systems for clean rooms
- Authors: Kokorin O.Y.1, Andronov F.I.2
-
Affiliations:
- MGSU
- "VESA"
- Issue: Vol 91, No 2 (2002)
- Pages: 7-10
- Section: Articles
- URL: https://journal-vniispk.ru/0023-124X/article/view/105497
- DOI: https://doi.org/10.17816/RF105497
- ID: 105497
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Abstract
Air conditioning systems for «clean rooms» are described. The operation of the central air conditioning system according to energy-saving technology is offered when only outside air is cooled and dehumidified in the central conditioner. Capital expenditures and energy consumption during operation are considerably reduced in this case.
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##article.viewOnOriginalSite##About the authors
O. Ya. Kokorin
MGSU
Author for correspondence.
Email: info@eco-vector.com
Dr. of Technical Sciences, Prof.
Russian FederationF. I. Andronov
"VESA"
Email: info@eco-vector.com
Russian Federation
References
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Fig. 1. Organization of an individual workplace for manufacturing electronic parts in a clean room: 1 - a vertical modular panel made of double steel sheets with thermal insulation between them; 2 - extract of industrial hazards from the workplace; 3 - end filter cassettes; 4 - filtering material of the "absolute filter" class, assembled from special paper made from super-thin glass fiber; 5 - ceiling modular panel with perforation; 6 - a special sealed lamp; 7 - transparent screen for directing supply air to the production process area; 8 - a transparent screen for directing the supply air to the working one; 9 - workplace in the form of a table with perforation; 10 - a worker in special clothes; 11 - floor modular panel with perforation; 12 - racks for holding and vibration damping of floor panels; 13 - exhaust through the perforation of the floor panels
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Fig. 2. Construction on the i,d-diagram of the calculated mode of operation of a traditional central ACS with zonal heaters in the warm period of the year in the climate of Moscow in a clean room
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Fig. 3. Construction on the i,d-diagram of the calculated year-round modes of operation of the proposed central ACS for maintenance of clean rooms by energy-saving technology.
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Fig. 4. Schematic diagram of the central ACS for maintenance of clean rooms by energy-saving technology: I - clean room; 2 - workplace with a table with perforation holes; 3 - air recirculation duct Lv from the raised floor of the clean room; 4 - central air supply and purification unit from technological units of CCKP, designed for capacity Ln=Ln,+Lv; 5 - central air supply unit from technological units of CCKP, designed for capacity by outdoor air supply Ln ~Lu; 6 - supply duct to the clean room 7 - end electric heaters controlled from the temperature control sensor tv; 8 - absolute filter in cassettes located above the perforated ceiling; 9 - exhaust unit designed for the capacity of the exhaust discharge air Ly
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