Enviar artigo por via de e-mail An error self-compensation mechanism for deposition of optical coatings with broadband optical monitoring
- Autores: Tikhonravov A.V.1, Kochikov I.V.1, Trubetskov M.K.2, Sharapova S.A.1, Zhupanov V.G.3, Yagola A.G.4
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Afiliações:
- Research Computer Center
- Max Planck Institute of Quantum Optics
- Lutch Scientific Research Institution
- Department of Physics
- Edição: Volume 72, Nº 3 (2017)
- Páginas: 274-278
- Seção: Optics and Spectroscopy. Laser Physics
- URL: https://journal-vniispk.ru/0027-1349/article/view/164768
- DOI: https://doi.org/10.3103/S0027134917030134
- ID: 164768
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Resumo
An error self-compensation mechanism is investigated for use during the deposition of optical coatings with broadband optical monitoring. The correlation of thickness errors caused by monitoring procedure is mathematically described. It is shown that this correlation of errors may result in the effect of selfcompensation of errors.
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Sobre autores
A. Tikhonravov
Research Computer Center
Autor responsável pela correspondência
Email: tikh@srcc.msu.su
Rússia, Moscow, 119991
I. Kochikov
Research Computer Center
Email: tikh@srcc.msu.su
Rússia, Moscow, 119991
M. Trubetskov
Max Planck Institute of Quantum Optics
Email: tikh@srcc.msu.su
Alemanha, Garching, 85748
S. Sharapova
Research Computer Center
Email: tikh@srcc.msu.su
Rússia, Moscow, 119991
V. Zhupanov
Lutch Scientific Research Institution
Email: tikh@srcc.msu.su
Rússia, Podolsk, Moscow
A. Yagola
Department of Physics
Email: tikh@srcc.msu.su
Rússia, Moscow, 119991
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