Resistance Si–Ti–Ce alloy for sputtering targets

Resumo

The effect of the cooling rate of an Si–20% Ti–5% Ce alloy on the microstructure, the micromechanical characteristics, and the residual thermal stresses in targets prepared from the alloy is studied. The required amount of targets prepared from this alloy can be obtained when it is cooled at a rate from 20 to 70°C/s. In this case, the alloy has a homogeneous structure and exhibits high strength characteristics; the residual stresses in a target are minimal and their distribution is the most uniform.