Отправить статью по E-mail Resistance Si–Ti–Ce alloy for sputtering targets
- Авторы: Kolesnikova I.G.1, Korotkov V.G.1, Kuz’mich Y.V.1
-
Учреждения:
- Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
- Выпуск: Том 2016, № 5 (2016)
- Страницы: 472-476
- Раздел: Article
- URL: https://journal-vniispk.ru/0036-0295/article/view/170574
- DOI: https://doi.org/10.1134/S0036029516050104
- ID: 170574
Цитировать
Открытый доступ
Доступ предоставлен
Только для подписчиков
Аннотация
The effect of the cooling rate of an Si–20% Ti–5% Ce alloy on the microstructure, the micromechanical characteristics, and the residual thermal stresses in targets prepared from the alloy is studied. The required amount of targets prepared from this alloy can be obtained when it is cooled at a rate from 20 to 70°C/s. In this case, the alloy has a homogeneous structure and exhibits high strength characteristics; the residual stresses in a target are minimal and their distribution is the most uniform.
Об авторах
I. Kolesnikova
Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
Автор, ответственный за переписку.
Email: koles_ig@chemy.kolasc.net.ru
Россия, ul. Fersmana 26a, Apatity, 184209
V. Korotkov
Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
Email: koles_ig@chemy.kolasc.net.ru
Россия, ul. Fersmana 26a, Apatity, 184209
Yu. Kuz’mich
Tananaev Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Science Center
Email: koles_ig@chemy.kolasc.net.ru
Россия, ul. Fersmana 26a, Apatity, 184209
Дополнительные файлы
