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CHOOSING THE BROADBAND MONITORING ALGORITHM FOR THE DEPOSITION PROCESS OF OPTICAL COATINGS WITH ACCOUNTING FOR THE SELF-COMPENSATION EFFECT OF ERRORS
- Authors: Sharov A.N1,2, Tikhonravov A.V3,4, Sharapova S.A3, Yagola A.G5
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Affiliations:
- Moscow State University
- Shenzhen MSU-BIT University, Faculty of Computational Mathematics and Cybernetics
- Moscow State University, Research Computing Center
- Moscow Center for Fundamental and Applied Mathematics
- МГУ имени М.В. Ломоносова
- Issue: Vol 65, No 4 (2025)
- Pages: 515–527
- Section: Partial Differential Equations
- URL: https://journal-vniispk.ru/0044-4669/article/view/295423
- DOI: https://doi.org/10.31857/S0044466925040085
- EDN: https://elibrary.ru/IDMQJS
- ID: 295423
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Abstract
Two algorithms for broadband optical monitoring of the deposition of optical coatings are considered: the first one is without solving the additional inverse problem for refining the thicknesses of already deposited layers, the second one is with its solution. It is shown that refinement of the thicknesses of already deposited layers reduces errors in the layer thicknesses, but does not always provide a more accurate implementation of the required spectral properties of the coating. It is demonstrated for the first time that when choosing a control algorithm, the presence of the error self-compensation effect should be taken into account.
About the authors
A. N Sharov
Moscow State University; Shenzhen MSU-BIT University, Faculty of Computational Mathematics and Cybernetics
Email: scharov.aleksandr@physics.msu.ru
Moscow, Russia; Shenzhen, China
A. V Tikhonravov
Moscow State University, Research Computing Center; Moscow Center for Fundamental and Applied MathematicsMoscow, Russia; Moscow, Russia
S. A Sharapova
Moscow State University, Research Computing CenterMoscow, Russia
A. G Yagola
МГУ имени М.В. ЛомоносоваМосква, Россия
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