Email this article Development of Piezoelectric Dynamic Deformation Transducers Based on Hot Polarization of Lead Zirconate-Titanate Ferroelectric Films
- Authors: Esipov Y.V.1, Biryukov S.V.1, Masychev S.I.1, Mukhortov V.M.1
-
Affiliations:
- Southern Scientific Center, Russian Academy of Sciences
- Issue: Vol 59, No 4 (2016)
- Pages: 423-427
- Section: Acoustic Measurements
- URL: https://journal-vniispk.ru/0543-1972/article/view/245874
- DOI: https://doi.org/10.1007/s11018-016-0983-4
- ID: 245874
Cite item
Open Access
Access granted
Subscription Access
Abstract
A technique of hot periodic sawtooth polarization of lead zirconate-titanate ferroelectric thin films is described. The films are deposited by reactive RF sputtering on a metal foil. Work on the development of oscillator-type piezoelectric dynamic deformation sensors is discussed.
About the authors
Yu. V. Esipov
Southern Scientific Center, Russian Academy of Sciences
Author for correspondence.
Email: yu-yesipov@yandex.ru
Russian Federation, Rostov-on-Don
S. V. Biryukov
Southern Scientific Center, Russian Academy of Sciences
Email: yu-yesipov@yandex.ru
Russian Federation, Rostov-on-Don
S. I. Masychev
Southern Scientific Center, Russian Academy of Sciences
Email: yu-yesipov@yandex.ru
Russian Federation, Rostov-on-Don
V. M. Mukhortov
Southern Scientific Center, Russian Academy of Sciences
Email: yu-yesipov@yandex.ru
Russian Federation, Rostov-on-Don
Supplementary files
