Estimation of the SEM beam diameter by video-signal curves from a trapezoidal structure: 1. Simulation experiment

Abstract

An experiment is performed to determine the electron beam diameter using a comparison of a video signal curve from a relief structure and the one calculated based on a simplified model of curve formation. Rather than the use of an experimental curve for comparison, this model experiment suggests the use of a curve calculated from the data on electron scattering in substrate by the Monte Carlo method. The comparison results revealed the difference between the calculated diameter value and the value of diameter of a model incident beam. It appeared that the parameters of the relief structure and the electron beam affected the calculated diameter values; as a result, these values can vary by several hundred percent in some cases.