Calculation of the angular distribution of reflected ions for the case of oblique incidence on the target surface

Abstract

The angular distributions of reflected medium-energy ions are numerically calculated for the case of oblique incidence on the target surface. Calculations are performed by solving the one-velocity transport equation involving the scattering cross section of a truncated Coulomb potential. The results obtained via the method of discrete streams are a generalization of well-known Chandrasekhar data corresponding to simpler scattering cross sections. Theoretical angular distributions are compared with those obtained experimentally.