Email this article X-ray Diffractometry Studies of the Structural Properties of Solid Solutions Based on Gallium Nitride
- Authors: Vigdorovich E.N.1, Ermoshin I.G.2
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Affiliations:
- Physico-Technological Institute
- ZAO Elma-Malakhit
- Issue: Vol 46, No 7 (2017)
- Pages: 458-461
- Section: Article
- URL: https://journal-vniispk.ru/1063-7397/article/view/186618
- DOI: https://doi.org/10.1134/S1063739717070149
- ID: 186618
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Abstract
Features of diffractometry multilayer heterostructures based on gallium nitride have been considered. Using a Vector-GaN instrument for X-ray diffractometry, the effect of the technological conditions of the preparation of the layers of the GaAlN/InGaN/GaN/Al2O3 heterostructure on their structural perfection has been demonstrated.
About the authors
E. N. Vigdorovich
Physico-Technological Institute
Author for correspondence.
Email: evgig@mail.ru
Russian Federation, Moscow
I. G. Ermoshin
ZAO Elma-Malakhit
Email: evgig@mail.ru
Russian Federation, Moscow
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