Email this article Laser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices
- Authors: Oblov K.Y.1, Samotaev N.N.1, Etrekova M.O.1, Gorshkova A.V.1
-
Affiliations:
- National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
- Issue: Vol 82, No 11 (2019)
- Pages: 1508-1512
- Section: Engineering Design of Nuclear Physics Equipment
- URL: https://journal-vniispk.ru/1063-7788/article/view/195869
- DOI: https://doi.org/10.1134/S1063778819110152
- ID: 195869
Cite item
Open Access
Access granted
Subscription Access
Abstract
The flexible laser micromilling technology for ceramic MEMS production of microhotplates in the surface mount device (SMD) package is described. Current results demonstrate that using described technology makes it possible to manufacture all parts of MEMS sensor in the SMD with form factor of SOT-23 package type.
About the authors
K. Yu. Oblov
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: NNSamotaev@mephi.ru
Russian Federation, Moscow, 115409
N. N. Samotaev
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Author for correspondence.
Email: NNSamotaev@mephi.ru
Russian Federation, Moscow, 115409
M. O. Etrekova
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: NNSamotaev@mephi.ru
Russian Federation, Moscow, 115409
A. V. Gorshkova
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: NNSamotaev@mephi.ru
Russian Federation, Moscow, 115409
Supplementary files
