Мақаланы E-mail арқылы жіберу Laser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices
- Авторлар: Oblov K.Y.1, Samotaev N.N.1, Etrekova M.O.1, Gorshkova A.V.1
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Мекемелер:
- National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
- Шығарылым: Том 82, № 11 (2019)
- Беттер: 1508-1512
- Бөлім: Engineering Design of Nuclear Physics Equipment
- URL: https://journal-vniispk.ru/1063-7788/article/view/195869
- DOI: https://doi.org/10.1134/S1063778819110152
- ID: 195869
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Аннотация
The flexible laser micromilling technology for ceramic MEMS production of microhotplates in the surface mount device (SMD) package is described. Current results demonstrate that using described technology makes it possible to manufacture all parts of MEMS sensor in the SMD with form factor of SOT-23 package type.
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Авторлар туралы
K. Oblov
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: NNSamotaev@mephi.ru
Ресей, Moscow, 115409
N. Samotaev
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Хат алмасуға жауапты Автор.
Email: NNSamotaev@mephi.ru
Ресей, Moscow, 115409
M. Etrekova
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: NNSamotaev@mephi.ru
Ресей, Moscow, 115409
A. Gorshkova
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: NNSamotaev@mephi.ru
Ресей, Moscow, 115409
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