Автор туралы ақпарат

Kalinkin, I. P.

Шығарылым Бөлім Атауы Файл
Том 52, № 6 (2018) Fabrication, Treatment, and Testing of Materials and Structures Effect of Chemical Treatment of a Silicon Surface on the Quality and Structure of Silicon-Carbide Epitaxial Films Synthesized by Atom Substitution