Автор туралы ақпарат
Shchukin, V. G.
| Шығарылым | Бөлім | Атауы | Файл |
| Том 53, № 1 (2019) | Fabrication, Treatment, and Testing of Materials and Structures | Deposition of Silicon Films Doped with Boron and Phosphorus by the Gas-Jet Plasma-Chemical Method | |
| Том 53, № 12 (2019) | Fabrication, Treatment, and Testing of Materials and Structures | Deposition of Amorphous and Microcrystalline Films of Silicon by the Gas-Jet Plasma-Chemical Method |