Formation of ZrO2 cubic phase microcrystals during crystallization of amorphous films deposited by laser ablation of Zr in an oxygen atmosphere

Abstract

The structure and phase transformations during annealing of zirconium dioxide films grown by pulsed laser sputtering of a Zr target in an oxygen atmosphere have been studied by transmission electron microscopy and electron diffraction methods. The conditions of the formation of both amorphous and cubic ZrO₂ phases have been determined. The electron beam impact on the amorphous film in vacuum is accompanied by the formation of zirconium dioxide microcrystals with fcc lattice. The average grain size in the crystallized film is ∼0.5 μm. The phase transformation is accompanied by film material densification. The relative change in the density during ZrO₂ crystallization is 10.27 ± 2.14%.