Influence of high-temperature annealing on the orientation of the unipolarity vector in lead zirconate titanate thin films
- Authors: Kanareikin A.G.1, Kaptelov E.Y.1, Senkevich S.V.1, Pronin I.P.1, Sergienko A.Y.2, Sergeeva O.N.3,4
-
Affiliations:
- Ioffe Institute
- Institute of Education Management of the Russian Academy of Education
- Tver State University
- Moscow Technological University (MIREA)
- Issue: Vol 58, No 11 (2016)
- Pages: 2325-2330
- Section: Ferroelectricity
- URL: https://journal-vniispk.ru/1063-7834/article/view/199197
- DOI: https://doi.org/10.1134/S1063783416110147
- ID: 199197
Cite item
Abstract
The factors responsible for the change in the orientation of the natural unipolarity vector due to heating to the Curie temperature of a Pt/PZT/Pt thin-film capacitor (PZT—lead zirconate titanate) formed on a TiO2/SiO2/Si substrate have been considered. Lead zirconate titanate thin layers containing a small excess of lead oxide have been formed ex situ using high-frequency magnetron sputtering with a variation in the annealing temperature (crystallization of the perovskite phase) in the range from 580 to 650°C. It has been assumed that the reorientation of the unipolarity vector in the PZT layer is caused by the change in the mechanism of crystallization of the perovskite phase with an increase in the annealing temperature.
About the authors
A. G. Kanareikin
Ioffe Institute
Email: Petrovich@mail.ioffe.ru
Russian Federation, Politekhnicheskaya ul. 26, St. Petersburg, 194021
E. Yu. Kaptelov
Ioffe Institute
Email: Petrovich@mail.ioffe.ru
Russian Federation, Politekhnicheskaya ul. 26, St. Petersburg, 194021
S. V. Senkevich
Ioffe Institute
Email: Petrovich@mail.ioffe.ru
Russian Federation, Politekhnicheskaya ul. 26, St. Petersburg, 194021
I. P. Pronin
Ioffe Institute
Author for correspondence.
Email: Petrovich@mail.ioffe.ru
Russian Federation, Politekhnicheskaya ul. 26, St. Petersburg, 194021
A. Yu. Sergienko
Institute of Education Management of the Russian Academy of Education
Email: Petrovich@mail.ioffe.ru
Russian Federation, ul. Chernyakhovskogo 2, St. Petersburg, 191119
O. N. Sergeeva
Tver State University; Moscow Technological University (MIREA)
Email: Petrovich@mail.ioffe.ru
Russian Federation, ul. Zhelyabova 33, Tver, 170100; pr. Vernadskogo 78, Moscow, 119454
Supplementary files
