Composition of nanocomposites of thin tin layers on porous silicon, formed by magnetron sputtering

Abstract

Morphology and surface composition of the nanocomposite of thin tin layers on porous silicon, formed by magnetron sputtering, are investigated by scanning electron microscopy and X-ray photoelectron spectroscopy. It has been found that the formed nanocomposites, depending on the thickness of the deposited tin layer, differ in the ratio of main phases: tin dioxide, tin suboxide, and metal tin. The proportion of oxidized tin in the phase composition of the composites decreases from the surface to the bulk of the sample. It is found that the deposition of tin nanolayers does not cause a significant change in the phase composition of the porous silicon substrate.