A new approach to formation of the topology of planar structures on the basis of a YBCO high-temperature superconductor

Аннотация

The paper presents a new etching-free technology for the formation of planar superconductor structures based on YBCO films with metal contacts. The required topology of superconducting elements from YBCO film is created by the proposed “preliminary topology mask” method. The ohmic contacts to the superconducting structure are produced by lift-off photolithography. In order to study the capabilities of this technology, measurements of superconducting bridges with a width of 3, 10, and 50 μm and test structures for measuring the contact resistance are performed.