Email this article Variations in optical and structural properties of zinc oxide films after laser processing
- Authors: Redka D.N.1, Mukhin N.V.1, Zakharov I.G.1
-
Affiliations:
- Saint Petersburg Electrotechnical University “LETI”
- Issue: Vol 61, No 11 (2016)
- Pages: 1744-1746
- Section: Short Communications
- URL: https://journal-vniispk.ru/1063-7842/article/view/198520
- DOI: https://doi.org/10.1134/S1063784216110207
- ID: 198520
Cite item
Open Access
Access granted
Subscription Access
Abstract
Effect of laser annealing on electrical and optical properties of zinc oxide films is analyzed. The films are fabricated using the plasma-chemical deposition under low pressure. ZnO amorphization under modifying irradiation is demonstrated.
About the authors
D. N. Redka
Saint Petersburg Electrotechnical University “LETI”
Author for correspondence.
Email: dnredka@gmail.com
Russian Federation, ul. Professora Popova 5, St. Petersburg, 197376
N. V. Mukhin
Saint Petersburg Electrotechnical University “LETI”
Email: dnredka@gmail.com
Russian Federation, ul. Professora Popova 5, St. Petersburg, 197376
I. G. Zakharov
Saint Petersburg Electrotechnical University “LETI”
Email: dnredka@gmail.com
Russian Federation, ul. Professora Popova 5, St. Petersburg, 197376
Supplementary files
