Variations in optical and structural properties of zinc oxide films after laser processing
- Autores: Redka D.N.1, Mukhin N.V.1, Zakharov I.G.1
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Afiliações:
- Saint Petersburg Electrotechnical University “LETI”
- Edição: Volume 61, Nº 11 (2016)
- Páginas: 1744-1746
- Seção: Short Communications
- URL: https://journal-vniispk.ru/1063-7842/article/view/198520
- DOI: https://doi.org/10.1134/S1063784216110207
- ID: 198520
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Resumo
Effect of laser annealing on electrical and optical properties of zinc oxide films is analyzed. The films are fabricated using the plasma-chemical deposition under low pressure. ZnO amorphization under modifying irradiation is demonstrated.
Sobre autores
D. Redka
Saint Petersburg Electrotechnical University “LETI”
Autor responsável pela correspondência
Email: dnredka@gmail.com
Rússia, ul. Professora Popova 5, St. Petersburg, 197376
N. Mukhin
Saint Petersburg Electrotechnical University “LETI”
Email: dnredka@gmail.com
Rússia, ul. Professora Popova 5, St. Petersburg, 197376
I. Zakharov
Saint Petersburg Electrotechnical University “LETI”
Email: dnredka@gmail.com
Rússia, ul. Professora Popova 5, St. Petersburg, 197376
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