Email this article Manufacturing of Sputtering Composite Targets Containing Phases of Co2FeSi or Co2MnSi Heusler Alloy
- Authors: Demidov E.S.1, Sdobnyakov V.V.1, Vazenmiller G.V.1, Chigirinskii Y.I.1, Dudin Y.A.1, Lesnikov V.P.1, Trushin V.N.1, Boldin M.S.1, Belkin O.A.1, Bobrov A.A.1, Sakharov N.V.1
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Affiliations:
- Lobachevsky State University of Nizhny Novgorod
- Issue: Vol 63, No 7 (2018)
- Pages: 1002-1005
- Section: Physical Science of Materials
- URL: https://journal-vniispk.ru/1063-7842/article/view/201659
- DOI: https://doi.org/10.1134/S1063784218070095
- ID: 201659
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Abstract
The paper presents a method for manufacturing mechanically strong sputtering composite targets containing the phase of the Co2FeSi or Co2MnSi Heusler alloy of the stoichiometric composition, which can be used for fabrication of spin electronic devices by high-frequency magnetron deposition and pulsed laser deposition of thin films.
About the authors
E. S. Demidov
Lobachevsky State University of Nizhny Novgorod
Email: sdobnyakov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603905
V. V. Sdobnyakov
Lobachevsky State University of Nizhny Novgorod
Author for correspondence.
Email: sdobnyakov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603905
G. V. Vazenmiller
Lobachevsky State University of Nizhny Novgorod
Email: sdobnyakov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603905
Yu. I. Chigirinskii
Lobachevsky State University of Nizhny Novgorod
Email: sdobnyakov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603905
Yu. A. Dudin
Lobachevsky State University of Nizhny Novgorod
Email: sdobnyakov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603905
V. P. Lesnikov
Lobachevsky State University of Nizhny Novgorod
Email: sdobnyakov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603905
V. N. Trushin
Lobachevsky State University of Nizhny Novgorod
Email: sdobnyakov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603905
M. S. Boldin
Lobachevsky State University of Nizhny Novgorod
Email: sdobnyakov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603905
O. A. Belkin
Lobachevsky State University of Nizhny Novgorod
Email: sdobnyakov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603905
A. A. Bobrov
Lobachevsky State University of Nizhny Novgorod
Email: sdobnyakov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603905
N. V. Sakharov
Lobachevsky State University of Nizhny Novgorod
Email: sdobnyakov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603905
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