Manufacturing of Sputtering Composite Targets Containing Phases of Co 2 FeSi or Co 2 MnSi Heusler Alloy

E. S. Demidov; V. V. Sdobnyakov; G. V. Vazenmiller; Yu. I. Chigirinskii; Yu. A. Dudin; V. P. Lesnikov; V. N. Trushin; M. S. Boldin; O. A. Belkin; A. A. Bobrov; N. V. Sakharov

doi:10.1134/S1063784218070095

Manufacturing of Sputtering Composite Targets Containing Phases of Co₂FeSi or Co₂MnSi Heusler Alloy

作者: Demidov E.S.¹, Sdobnyakov V.V.¹, Vazenmiller G.V.¹, Chigirinskii Y.I.¹, Dudin Y.A.¹, Lesnikov V.P.¹, Trushin V.N.¹, Boldin M.S.¹, Belkin O.A.¹, Bobrov A.A.¹, Sakharov N.V.¹
隶属关系:
1. Lobachevsky State University of Nizhny Novgorod
期: 卷 63, 编号 7 (2018)
页面: 1002-1005
栏目: Physical Science of Materials
URL: https://journal-vniispk.ru/1063-7842/article/view/201659
DOI: https://doi.org/10.1134/S1063784218070095
ID: 201659

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The paper presents a method for manufacturing mechanically strong sputtering composite targets containing the phase of the Co₂FeSi or Co₂MnSi Heusler alloy of the stoichiometric composition, which can be used for fabrication of spin electronic devices by high-frequency magnetron deposition and pulsed laser deposition of thin films.