Variations in optical and structural properties of zinc oxide films after laser processing
- Авторлар: Redka D.N.1, Mukhin N.V.1, Zakharov I.G.1
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Мекемелер:
- Saint Petersburg Electrotechnical University “LETI”
- Шығарылым: Том 61, № 11 (2016)
- Беттер: 1744-1746
- Бөлім: Short Communications
- URL: https://journal-vniispk.ru/1063-7842/article/view/198520
- DOI: https://doi.org/10.1134/S1063784216110207
- ID: 198520
Дәйексөз келтіру
Аннотация
Effect of laser annealing on electrical and optical properties of zinc oxide films is analyzed. The films are fabricated using the plasma-chemical deposition under low pressure. ZnO amorphization under modifying irradiation is demonstrated.
Авторлар туралы
D. Redka
Saint Petersburg Electrotechnical University “LETI”
Хат алмасуға жауапты Автор.
Email: dnredka@gmail.com
Ресей, ul. Professora Popova 5, St. Petersburg, 197376
N. Mukhin
Saint Petersburg Electrotechnical University “LETI”
Email: dnredka@gmail.com
Ресей, ul. Professora Popova 5, St. Petersburg, 197376
I. Zakharov
Saint Petersburg Electrotechnical University “LETI”
Email: dnredka@gmail.com
Ресей, ul. Professora Popova 5, St. Petersburg, 197376
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