A study of products formed in ablation of single-crystal silicon in aqueous medium under irradiation with nanosecond pulses from fiber-optic ytterbium laser
- Authors: Veiko V.P.1, Polyakov D.S.1, Skvortsov A.M.1, Chopenko E.S.1
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Affiliations:
- St. Petersburg National Research University of Information Technologies, Mechanics, and Optics
- Issue: Vol 43, No 5 (2017)
- Pages: 435-438
- Section: Article
- URL: https://journal-vniispk.ru/1063-7850/article/view/204517
- DOI: https://doi.org/10.1134/S1063785017050121
- ID: 204517
Cite item
Abstract
Products formed in laser ablation of single-crystal silicon beneath a water layer under irradiation with nanosecond pulses from a fiber-optic ytterbium laser have been studied. SEM images of structures deposited by dewatering of the colloid solution formed in the course of the ablation are presented. IR spectroscopy and Raman spectroscopy were used to determine their chemical composition and structural features.
About the authors
V. P. Veiko
St. Petersburg National Research University of Information Technologies, Mechanics, and Optics
Email: polyakovdmitry1988@gmail.com
Russian Federation, St. Petersburg, 197101
D. S. Polyakov
St. Petersburg National Research University of Information Technologies, Mechanics, and Optics
Author for correspondence.
Email: polyakovdmitry1988@gmail.com
Russian Federation, St. Petersburg, 197101
A. M. Skvortsov
St. Petersburg National Research University of Information Technologies, Mechanics, and Optics
Email: polyakovdmitry1988@gmail.com
Russian Federation, St. Petersburg, 197101
E. S. Chopenko
St. Petersburg National Research University of Information Technologies, Mechanics, and Optics
Email: polyakovdmitry1988@gmail.com
Russian Federation, St. Petersburg, 197101
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