Mathematical simulation of a membrane capacitive compensation pressure transducer
- Авторы: Eikhval’d A.I.1, Sadkovskaya I.V.2, Eikhval’d T.A.2
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Учреждения:
- St. Petersburg State University
- D.I. Mendeleyev Institute for Metrology
- Выпуск: Том 42, № 8 (2016)
- Страницы: 769-771
- Раздел: Article
- URL: https://journal-vniispk.ru/1063-7850/article/view/200343
- DOI: https://doi.org/10.1134/S1063785016080071
- ID: 200343
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Аннотация
The operation of a membrane capacitive pressure transducer with electrostatic compensation of the membrane deformation has been mathematically simulated. It is shown that the theory describing these instruments is incorrect and the error in measuring pressure by them may be as high as 25–29% of the measured value, which makes them inappropriate for use in pressure metrology.
Об авторах
A. Eikhval’d
St. Petersburg State University
Автор, ответственный за переписку.
Email: a.eichvald@spbu.ru
Россия, St. Petersburg, 199034
I. Sadkovskaya
D.I. Mendeleyev Institute for Metrology
Email: a.eichvald@spbu.ru
Россия, St. Petersburg, 190005
T. Eikhval’d
D.I. Mendeleyev Institute for Metrology
Email: a.eichvald@spbu.ru
Россия, St. Petersburg, 190005
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