Email this article Mathematical simulation of a membrane capacitive compensation pressure transducer
- Authors: Eikhval’d A.I.1, Sadkovskaya I.V.2, Eikhval’d T.A.2
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Affiliations:
- St. Petersburg State University
- D.I. Mendeleyev Institute for Metrology
- Issue: Vol 42, No 8 (2016)
- Pages: 769-771
- Section: Article
- URL: https://journal-vniispk.ru/1063-7850/article/view/200343
- DOI: https://doi.org/10.1134/S1063785016080071
- ID: 200343
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Abstract
The operation of a membrane capacitive pressure transducer with electrostatic compensation of the membrane deformation has been mathematically simulated. It is shown that the theory describing these instruments is incorrect and the error in measuring pressure by them may be as high as 25–29% of the measured value, which makes them inappropriate for use in pressure metrology.
About the authors
A. I. Eikhval’d
St. Petersburg State University
Author for correspondence.
Email: a.eichvald@spbu.ru
Russian Federation, St. Petersburg, 199034
I. V. Sadkovskaya
D.I. Mendeleyev Institute for Metrology
Email: a.eichvald@spbu.ru
Russian Federation, St. Petersburg, 190005
T. A. Eikhval’d
D.I. Mendeleyev Institute for Metrology
Email: a.eichvald@spbu.ru
Russian Federation, St. Petersburg, 190005
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