Research on the Superhydrophilic Properties of Tio2 Films Formed by the Reactive Magnetron Sputtering Method and the Development of technology to Enhance them
- Authors: Shashin D.E.1, Vladimirov D.S.1
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Affiliations:
- Volga State University of Technology
- Issue: No 2 (2024)
- Pages: 74-85
- Section: Instrument engineering
- URL: https://journal-vniispk.ru/2306-2819/article/view/270580
- DOI: https://doi.org/10.25686/2306-2819.2024.2.74
- EDN: https://elibrary.ru/EUPJJE
- ID: 270580
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Abstract
Introduction. Currently, there is significant focus on researching metal oxide films and developing production technologies to create innovative devices widely utilized across various industries and scientific fields. Many of these devices rely on photoinduced processes, such as photocatalytic activity and superhydrophilicity. This study specifically examines the superhydrophilic property of titanium oxide films. The primary parameter used to assess this property is the contact angle, which approaches 0° in superhydrophilic surfaces. However, existing studies have not provided a comprehensive understanding of the mechanisms or causes behind superhydrophilicity on titanium oxide film surfaces. Therefore, achieving superhydrophilic films requires reliance on advanced technologies and production methods. Among these methods, reactive magnetron sputtering stands out due to its superior properties. The novelty of this study lies in demonstrating that titanium oxide films produced by reactive magnetron sputtering exhibit higher superhydrophilic properties compared to those previously reported. The aim of the work is to develop a technology for forming superhydrophilic titanium oxide films using reactive magnetron sputtering and experimentally identify parameters that affect their superhydrophilic properties. Conclusions. A series of samples was obtained using the UVN-71P 3 vacuum unit. Data analysis from all experiments revealed that the superhydrophilic properties are influenced by the thickness of the titanium oxide film, the concentration of argon and oxygen, the substrate temperature, and the substrate material. Additionally, the composition of the droplets affects the superhydrophilic properties. Parameters such as the distance between the target and the substrate (100 mm) and the target current (1.5 A) remained constant in all experiments.
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About the authors
Dmitry E. Shashin
Volga State University of Technology
Author for correspondence.
Email: ShashinDE@volgatech.net
ORCID iD: 0000-0002-8222-2824
SPIN-code: 8962-1241
Candidate of Engineering Sciences, Associate Professor at the Department of Design and Production of Radio Equipment
Russian Federation, 3, Lenin sqr., Yoshkar-Ola, 424000Dmitry S. Vladimirov
Volga State University of Technology
Email: ShashinDE@volgatech.net
SPIN-code: 7717-7915
Design Engineer
Russian Federation, 3, Lenin sqr., Yoshkar-Ola, 424000References
- Nahid A. A. A Self-Cleaning Approach Utilizing Metal Oxide Thin Films and Nanocomposites. Nature-Inspired Self Cleaning Surfaces in the Nanotechnology Era. 2023:59-72. doi: 10.5772/intechopen.111971
- Rudakova A.V., Oparicheva U.G., Grishina A.E. et al. The effect of photoinduced superhydrophilicity of metal oxide surfaces. Fundamental research. 2013;(10):1959-1963. (In Russ.).
- Shapovalov V.I. Nanopowders and films of titanium oxide for photocatalysis: a review. Glass Physics and Chemistry. 2010;36(2):121-157. (In Russ.).
- Irie H., Hashimoto K. Photocatalytic active surfaces and photo-induced high hydrophilicity/high Hydrophobicity. Hdb Env Chem. 2005;(2):425 –450. doi: 10.1007/b138190
- Bahnemann D. et al. Photo-induced hydrophilicity and self-cleaning: models and reality.
- Energy Environ. 2012;(5):7491 – 7507. doi: 10.1039/C2EE03390A
- Miyauchi M. et al. Photocatalysis and photoinduced hydrophilicity of various metal oxide thin films. Chem. Mater. 2002;14(6):2812 –2816. doi: 10.1021/cm020076p
- Guo K., Jiang Bo, Peng Zhao et al. Review on the Superhydrophilic coating of Electric insulator. IOP Conference Series: Earth and Environmental Science. 2021;651:1-10. doi: 10.1088/1755-1315/651/2/022037
- Villa N., Golosov D.A., Nguyen T.D. Formation of titanium oxide thin films by reactive magnetron sputtering. Doklady BGUIR. 2019;(5):87-93. (In Russ.).
- Anpo M. et al. Mechanism of photoinduced superhydrophilicity on the TiO2 photocatalyst surface. J. Phys. Chem. 2005;109(32):15422-15428. doi: 10.1021/jp058075i
- Brus V.V., Kovalyuk Z.D., Maryanchuk P.D. Optical properties of thin TiO2-MnO2 films produced by elec-tron beam evaporation. Technical Physics. 2012;82(8):110-113. (In Russ.).
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