Microturbines Formed with the Aid of Direct Laser Recording on Photoresist
- Авторы: Skidanov R.V.1,2, Moiseev O.Y.1,2, Ganchevskaya S.V.1,2
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Учреждения:
- Institute of Image Processing Systems
- Korolev State Aerospace University
- Выпуск: Том 63, № 6 (2018)
- Страницы: 862-865
- Раздел: Optics
- URL: https://journal-vniispk.ru/1063-7842/article/view/201532
- DOI: https://doi.org/10.1134/S1063784218060208
- ID: 201532
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Аннотация
A method for fabrication of mechanical elements (microturbines) that receive torque from vortex optical beams is proposed. Experimental results on fabrication of multiple microturbines are presented. Shapes of the microturbines are measured using an optical microscope, ZYGO white-light interferometer, and electron microscope.
Об авторах
R. Skidanov
Institute of Image Processing Systems; Korolev State Aerospace University
Email: sofi@smr.ru
Россия, Samara, 443001; Samara, 443086
O. Moiseev
Institute of Image Processing Systems; Korolev State Aerospace University
Email: sofi@smr.ru
Россия, Samara, 443001; Samara, 443086
S. Ganchevskaya
Institute of Image Processing Systems; Korolev State Aerospace University
Автор, ответственный за переписку.
Email: sofi@smr.ru
Россия, Samara, 443001; Samara, 443086
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