电邮这篇文章 Microturbines Formed with the Aid of Direct Laser Recording on Photoresist
- 作者: Skidanov R.V.1,2, Moiseev O.Y.1,2, Ganchevskaya S.V.1,2
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隶属关系:
- Institute of Image Processing Systems
- Korolev State Aerospace University
- 期: 卷 63, 编号 6 (2018)
- 页面: 862-865
- 栏目: Optics
- URL: https://journal-vniispk.ru/1063-7842/article/view/201532
- DOI: https://doi.org/10.1134/S1063784218060208
- ID: 201532
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详细
A method for fabrication of mechanical elements (microturbines) that receive torque from vortex optical beams is proposed. Experimental results on fabrication of multiple microturbines are presented. Shapes of the microturbines are measured using an optical microscope, ZYGO white-light interferometer, and electron microscope.
作者简介
R. Skidanov
Institute of Image Processing Systems; Korolev State Aerospace University
Email: sofi@smr.ru
俄罗斯联邦, Samara, 443001; Samara, 443086
O. Moiseev
Institute of Image Processing Systems; Korolev State Aerospace University
Email: sofi@smr.ru
俄罗斯联邦, Samara, 443001; Samara, 443086
S. Ganchevskaya
Institute of Image Processing Systems; Korolev State Aerospace University
编辑信件的主要联系方式.
Email: sofi@smr.ru
俄罗斯联邦, Samara, 443001; Samara, 443086
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