Email this article Microturbines Formed with the Aid of Direct Laser Recording on Photoresist
- Authors: Skidanov R.V.1,2, Moiseev O.Y.1,2, Ganchevskaya S.V.1,2
-
Affiliations:
- Institute of Image Processing Systems
- Korolev State Aerospace University
- Issue: Vol 63, No 6 (2018)
- Pages: 862-865
- Section: Optics
- URL: https://journal-vniispk.ru/1063-7842/article/view/201532
- DOI: https://doi.org/10.1134/S1063784218060208
- ID: 201532
Cite item
Open Access
Access granted
Subscription Access
Abstract
A method for fabrication of mechanical elements (microturbines) that receive torque from vortex optical beams is proposed. Experimental results on fabrication of multiple microturbines are presented. Shapes of the microturbines are measured using an optical microscope, ZYGO white-light interferometer, and electron microscope.
About the authors
R. V. Skidanov
Institute of Image Processing Systems; Korolev State Aerospace University
Email: sofi@smr.ru
Russian Federation, Samara, 443001; Samara, 443086
O. Yu. Moiseev
Institute of Image Processing Systems; Korolev State Aerospace University
Email: sofi@smr.ru
Russian Federation, Samara, 443001; Samara, 443086
S. V. Ganchevskaya
Institute of Image Processing Systems; Korolev State Aerospace University
Author for correspondence.
Email: sofi@smr.ru
Russian Federation, Samara, 443001; Samara, 443086
Supplementary files
