Enviar artigo por via de e-mail Microturbines Formed with the Aid of Direct Laser Recording on Photoresist
- Autores: Skidanov R.V.1,2, Moiseev O.Y.1,2, Ganchevskaya S.V.1,2
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Afiliações:
- Institute of Image Processing Systems
- Korolev State Aerospace University
- Edição: Volume 63, Nº 6 (2018)
- Páginas: 862-865
- Seção: Optics
- URL: https://journal-vniispk.ru/1063-7842/article/view/201532
- DOI: https://doi.org/10.1134/S1063784218060208
- ID: 201532
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Resumo
A method for fabrication of mechanical elements (microturbines) that receive torque from vortex optical beams is proposed. Experimental results on fabrication of multiple microturbines are presented. Shapes of the microturbines are measured using an optical microscope, ZYGO white-light interferometer, and electron microscope.
Sobre autores
R. Skidanov
Institute of Image Processing Systems; Korolev State Aerospace University
Email: sofi@smr.ru
Rússia, Samara, 443001; Samara, 443086
O. Moiseev
Institute of Image Processing Systems; Korolev State Aerospace University
Email: sofi@smr.ru
Rússia, Samara, 443001; Samara, 443086
S. Ganchevskaya
Institute of Image Processing Systems; Korolev State Aerospace University
Autor responsável pela correspondência
Email: sofi@smr.ru
Rússia, Samara, 443001; Samara, 443086
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